Trifluorosilane (SiHF3)	F3H1Si1(g)
T(K)	Cp	S	-[G-H(Tr)]/T	H-H(Tr)	delta-f H	delta-f G	log Kf
0	0.	0.	INFINITE	-13.544	-1193.663	-1193.663	INFINITE
100	38.013	224.001	325.165	-10.116	-1196.362	-1187.787	620.436
200	51.293	254.467	282.691	-5.645	-1198.809	-1178.233	307.723
250	57.690	266.604	278.281	-2.919	-1199.886	-1172.962	245.077
298.15	63.485	277.268	277.268	0.	-1200.808	-1167.691	204.575
300	63.696	277.662	277.269	0.118	-1200.841	-1167.485	203.277
350	69.048	287.892	278.065	3.439	-1201.662	-1161.859	173.398
400	73.663	297.421	279.896	7.010	-1202.352	-1156.125	150.974
450	77.588	306.330	282.343	10.794	-1202.923	-1150.311	133.525
500	80.918	314.682	285.164	14.759	-1203.391	-1144.439	119.559
600	86.189	329.926	291.379	23.128	-1204.073	-1132.579	98.600
700	90.118	343.521	297.875	31.952	-1204.492	-1120.628	83.622
800	93.123	355.759	304.358	41.121	-1204.724	-1108.629	72.386
900	95.469	366.868	310.696	50.555	-1204.820	-1096.610	63.646
1000	97.332	377.027	316.829	60.198	-1204.824	-1084.586	56.653
1100	98.831	386.377	322.732	70.009	-1204.769	-1072.565	50.932
1200	100.052	395.030	328.401	79.955	-1204.679	-1060.550	46.165
1300	101.057	403.080	333.839	90.012	-1204.577	-1048.543	42.131
1400	101.891	410.600	339.056	100.161	-1204.478	-1036.545	38.674
1500	102.591	417.655	344.064	110.386	-1204.397	-1024.552	35.678
1600	103.183	424.295	348.873	120.676	-1204.343	-1012.565	33.057
1700	103.687	430.566	353.495	131.020	-1254.498	-1000.133	30.730
1800	104.119	436.505	357.944	141.411	-1254.284	-985.176	28.589
1900	104.492	442.145	362.228	151.842	-1254.066	-970.232	26.674
2000	104.816	447.513	366.359	162.307	-1253.847	-955.298	24.950
2100	105.099	452.634	370.346	172.804	-1253.624	-940.377	23.391
2200	105.347	457.529	374.199	183.326	-1253.394	-925.466	21.973
2300	105.567	462.217	377.925	193.872	-1253.156	-910.565	20.680
2400	105.761	466.714	381.531	204.439	-1252.905	-895.675	19.494
2500	105.934	471.035	385.025	215.024	-1252.636	-880.796	18.403
2600	106.089	475.193	388.414	225.625	-1252.347	-865.928	17.397
2700	106.228	479.199	391.702	236.241	-1252.032	-851.072	16.465
2800	106.353	483.065	394.897	246.870	-1251.688	-836.227	15.600
2900	106.466	486.799	398.002	257.511	-1251.312	-821.396	14.795
3000	106.569	490.410	401.022	268.163	-1250.901	-806.578	14.044
3100	106.662	493.906	403.962	278.825	-1250.450	-791.775	13.341
3200	106.747	497.294	406.826	289.495	-1249.960	-776.987	12.683
3300	106.825	500.580	409.618	300.174	-1249.426	-762.214	12.065
3400	106.896	503.770	412.340	310.860	-1248.848	-747.459	11.483
3500	106.961	506.869	414.997	321.553	-1248.225	-732.721	10.935
3600	107.021	509.883	417.591	332.252	-1631.707	-707.541	10.266
3700	107.077	512.816	420.125	342.957	-1630.577	-681.885	9.626
3800	107.128	515.673	422.602	353.667	-1629.402	-656.261	9.021
3900	107.175	518.456	425.025	364.382	-1628.182	-630.667	8.447
4000	107.220	521.170	427.394	375.102	-1626.917	-605.106	7.902
4100	107.261	523.818	429.714	385.826	-1625.606	-579.577	7.384
4200	107.299	526.403	431.986	396.554	-1624.251	-554.080	6.891
4300	107.334	528.928	434.211	407.286	-1622.851	-528.617	6.421
4400	107.368	531.396	436.392	418.021	-1621.408	-503.186	5.974
4500	107.399	533.810	438.530	428.759	-1619.922	-477.788	5.546
4600	107.428	536.170	440.627	439.501	-1618.395	-452.424	5.137
4700	107.455	538.481	442.684	450.245	-1616.826	-427.094	4.747
4800	107.481	540.744	444.704	460.992	-1615.217	-401.797	4.372
4900	107.505	542.960	446.686	471.741	-1613.570	-376.535	4.014
5000	107.528	545.132	448.634	482.492	-1611.885	-351.306	3.670
5100	107.549	547.262	450.547	493.246	-1610.162	-326.112	3.340
5200	107.569	549.350	452.427	504.002	-1608.404	-300.951	3.023
5300	107.589	551.399	454.275	514.760	-1606.611	-275.824	2.718
5400	107.607	553.411	456.092	525.520	-1604.785	-250.732	2.425
5500	107.624	555.385	457.880	536.282	-1602.925	-225.675	2.143
5600	107.640	557.325	459.638	547.045	-1601.034	-200.651	1.872
5700	107.655	559.230	461.369	557.809	-1599.113	-175.661	1.610
5800	107.670	561.102	463.072	568.576	-1597.161	-150.705	1.357
5900	107.684	562.943	464.749	579.343	-1595.181	-125.783	1.114
6000	107.697	564.753	466.401	590.113	-1593.173	-100.896	0.878
